Gas Retention Performance* of CLEANSORB Dry Bed Absorbers
| Gas or Liquid Precursor Species | Chemical Formula | Outlet Concentration |
|---|---|---|
| Ammonia | NH3 | 20 ppm |
| Arsine | AsH3 | 0.05 ppm |
| Bis(cyclopentadienyl)magnesium | Mg(C5H5)2 | 3 mg/m3 (MgO) |
| Bis(tert-butylamino)silane | SiH2(NHC4H9)2 | 5 ppm (SiH4) |
| Boron tribromide | BBr3 | 1 ppm |
| Boron trichloride | BCl3 | 1 ppm |
| Boron trifluoride | BF3 | 0.35 ppm |
| Bromine | Br2 | 0.1 ppm |
| Carbon monoxide | CO | 30 ppm |
| Chlorine | Cl2 | 0.5 ppm |
| Chlorine trifluoride | ClF3 | 0.1 ppm |
| Chromium hexacarbonyl | Cr(CO)6 | 2 mg/m3 (Cr) |
| Diborane | B2H6 | 0.1 ppm |
| Dichlorosilane | SiH2Cl2 | 2 ppm (HCl) |
| Diethyl telluride | Te(C2H5)2 | 0.1 mg/m3 (Te) |
| Diethylamine | C4H11N | 5 ppm |
| Diethylzinc (DEZn) | Zn(C2H5)2 | 2 mg/m3 (Zn) |
| Digermane | Ge2H6 | 0.2 ppm (GeH4) |
| Dimethyl dimethoxy silane | Si(CH3)2(OCH3)2 | 5 ppm (SiH4) |
| Dimethyl silane | SiH2(CH3)2 | 5 ppm (SiH4) |
| Dimethyl telluride | Te(CH3)2 | 0.1 mg/m3 (Te) |
| Dimethylamine | C2H7N | 2 ppm |
| Dimethylcadmium | Cd(CH3)2 | 0.01 mg/m3 (Cd) |
| Dimethylhydrazine (UDMH) | N2H2(CH3)2 | 0.01 ppm |
| Dimethylzinc | Zn(CH3)2 | 2 mg/m3 (Zn) |
| Disilane | Si2H6 | 5 ppm |
| Ethylmethylamine | C3H9N | 2 ppm (dimethylamine) |
| Fluorine | F2 | 1 ppm |
| Fluorophosgene / Carbonyl fluoride | COF2 | 1 ppm (HF) |
| Formaldehyde | CH2O | 0.3 ppm |
| Germane | GeH4 | 0.2 ppm |
| Hydrazine | N2H4 | 0.01 ppm |
| Hydrogen bromide | HBr | 1 ppm |
| Hydrogen chloride | HCl | 2 ppm |
| Hydrogen fluoride | HF | 1 ppm |
| Hydrogen selenide | H2Se | 0.015 ppm |
| Hydrogen sulfide | H2S | 5 ppm |
| Iodine | I2 | 0.1 ppm |
| Methyltrichlorosilane | CH3SiCl3 | 2 ppm (HCl) |
| Monomethyl silane | SiH3CH3 | 5 ppm (SiH4) |
| Nitric oxide | NO | 25 ppm |
| Nitrogen dioxide | N2O4 (NO2) | 3 ppm |
| Pentakis(dimethylamino)tantalum (PDMATa) | Ta(N(CH3)2)5 | 2 ppm (dimethylamine) |
| Phosgene | COCl2 | 0.02 ppm |
| Phosphine | PH3 | 0.1 ppm |
| Phosphorus pentachloride | PCl5 | 1 mg/m3 |
| Phosphorus tribromide | PBr3 | 0.5 ppm |
| Phosphorus trichloride | PCl3 | 0.5 ppm |
| Phosphorus Trifluoride | PF3 | 3 ppm |
| Phosphorylchloride | POCl3 | 0.2 ppm |
| Ruthenocene | C10H10Ru | 20 mg/m3 (Ru) |
| Silane | SiH4 | 5 ppm |
| Stibine | SbH3 | 0.1 ppm |
| Sulfur dioxide | SO2 | 0.5 ppm |
| Tantalum ethoxide | Ta(OC2H5)5 | 20 mg/m3 (Ta2O5) |
| Tantalum pentachloride | TaCl5 | 2 ppm (HCl) |
| Tantalum pentafluoride | TaF5 | 1 ppm (HF) |
| Tellurium hexafluoride | TeF6 | 0.02 ppm |
| Tertiarybutylarsine (TBAs) | AsH2(C4H9) | 0.01 mg/m3 (As) |
| Tertiarybutylphosphine (TBP) | PH2(C4H9) | 0.1 ppm (PH3) |
| Tetrabromomethane | CBr4 | 1 ppm (HBr) |
| Tetracarbonylnickel | Ni(CO)4 | 0.2 mg/m3 (Ni) |
| Tetrachlorosilane | SiCl4 | 2 ppm (HCl) |
| Tetraethyl orthosilicate | Si(OC2H5)4 | 10 ppm |
| Tetrafluorosilane | SiF4 | 1 ppm (HF) |
| Tetrakis(dimethylamino)hafnium (TDMAHf) | Hf(N(CH3)2)4 | 2 ppm (dimethylamine) |
| Tetrakis(dimethylamino)titanium (TDMATi) | Ti(N(CH3)2)4 | 2 ppm (dimethylamine) |
| Tetrakis(dimethylamino)zirconium (TDMAZr) | Zr(N(CH3)2)4 | 2 ppm (dimethylamine) |
| Tetrakis(ethylmethylamino)hafnium (TEMAHf) | Hf(NC2H5CH3)4 | 2 ppm (dimethylamine) |
| Tetrakis(ethylmethylamino)zirconium (TEMAZr) | Zr(NC2H5CH3)4 | 2 ppm (dimethylamine) |
| Titanium tetrachloride | TiCl4 | 2 ppm (HCl) |
| Titanium tetrafluoride | TiF4 | 1 ppm (HF) |
| Trichlorosilane | SiHCl3 | 2 ppm (HCl) |
| Triethylaluminum | Al(C2H5)3 | 2 mg/m3 (Al) |
| Triethylborane | B(C2H5)3 | 0.5 mg/m3 ( H3BO3) |
| Triethylgallium | Ga(C2H5)3 | 3 mg/m3 (Ga2O3) |
| Triethylindium | In(C2H5)3 | 0.1 mg/m3 (In) |
| Triethylphosphate | PO(C2H5O)3 | 50 mg/m3 |
| Trimethyl phosphite | C3H9O3P | 2 ppm |
| Trimethylaluminum (TMAl) | Al(CH3)3 | 2 mg/m3 (Al) |
| Trimethylantimony | Sb(CH3)3 | 0.5 mg/m3 (Sb) |
| Trimethylboron | B(CH3)3 | 0.1 ppm |
| Trimethylgallium (TMGa) | Ga(CH3)3 | 3 mg/m3 (Ga2O3) |
| Trimethylindium (TMIn) | In(CH3)3 | 0.1 mg/m3 (In) |
| Trisilane | Si3H8 | 5 ppm (SiH4) |
| Tungsten hexacarbonyl | W(CO)6 | 5 mg/m3 (W) |
| Tungsten hexafluoride | WF6 | 1 ppm (HF) |
| Xenon difluoride | XeF2 | 1 ppm (F2) |
* Systems specifications are based on review and approval of the individual process application