NOVASAFE

Dry Bed Abatement Technology

 
NOVASAFE combines high efficiency and high capacity in a compact, in-situ solution providing compliance with appropriate exhaust gas regulatory requirements.

NOVASAFE is a passive abatement solution for semiconductor, vent gas, R&D, and laboratory applications. As a zero footprint scrubber, the NOVASAFE can be easily integrated with your vacuum pump system.

Effluents are abated with the NOVASAFE to sub-TLV levels from roughing pumps. There are no moving parts. Change-outs are accomplished easily and have minimal impact on operations. With its compact and low impact design, the NOVASAFE is the ultimate uptime and economical abatement solution.
 
 

Applications


  • Ion Implant
  • Vent Gas
  • Lab Instruments
  • ETCH
  • ALD
  • CVD
  • III-V MOCVD
  • Chamber Clean

Note: Low flow R&D and Laboratory applications

Advantages


  • Chemisorption
  • Each canister connected to one pump
  • Continuous passive operation
  • Low operating and capital cost
  • Process selectable granulate mix
  • Compact size

Nova Safe Specifications

PERFORMANCE


Granulate 9.5 Liters
Pressure Drop 0.5" W.C. (13 mm W.C.)(1)
Max Pump Flow Sustained 28 lpm (1 cfm)
Color Change Indicator(1) Acid or Hydride


FACILITIES


Inlet Connection KF-50
Outlet Connection KF-50
Draw -2" w.c.
Clearance From each connection 6"
Overall Dimensions 14H x 10W x 12.6D in (356 x 254 x 320 mm)
Weight(1) 30 lbs (13.6 kg)


ADDITIONAL PORTS


Air Oxidation Port (1) 1/4" FNPT
Toxic Gas Monitor Port 1/4" Compression Fitting
Pressure Monitor Port 1/4" Compression Fitting (1) Process Dependent


OPTIONS AND ACCESSORIES


Bionics End Point Detector
Inlet Pressure Monitor(Gauge)
 
 
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