NOVAPURE

Dry Bed Abatement – Certified Pre-Owned Equipment

 
The Novapure series offers a safe, efficient and reliable solution for treatment of hazardous process gases and by-products.

This unique system uses chemisorptive granulate technology to treat process gases in a negative pressure environment ensuring only inbound flows. Continuous gas monitoring assures total point-of-use gas treatment below TLV levels. In the event of a power outage, the Novapure system will continue to treat the inflows.

The built-in 90% depletion feature provides warning of breakthrough when the granulate is 90% consumed. The remaining capacity allows the current process to run-to-finish and time to schedule a shutdown for canister replacement.

Chemisorptive technology provides irreversible reactions with process gases and their by- products, forming non-volatile solids. The spent canister can be easily and safely disposed of or incinerated.
 
 
 
 

Applications


  • Ion Implant
  • CVD
  • MOCVD
  • Metal Etch
  • Cylinder change purging
  • Others upon request


Advantages


  • SEMI S2 and CE compliance
  • Removal efficiency below TLV levels
  • Continuous passive operation
  • Constant pressure control system
  • Integrated gas monitoring
  • Low maintenance
  • Automatic scrubbed by-pass

NOVAPURE EGS300 Specifications

PERFORMANCE


Process Flow Per System 2800 slm (99 cfm)-Blower 175 slm-Eductor
Compressed Gas
Nitrogen

100 slm
Enclosure Exhaust 4,200 slm (150 scfm)
Power Consumption 2.1 kW
Canister Size 32 gal (standard)


FACILITIES


Compressed Gas
Nitrogen

80-90 psig (5-6 bar) 3/8" compression fitting
Electrical Supply 208/220 VAC, 50 Hz
Connections
Process Inlet/Outlet
Enclosure Exhaust
Static Duct Pressure

KF-50
6" (152 mm)
0.5 in w.c. (1.2 mbar)
Enclosure Dimensions 24 x 24 x 66 in (609.6 x 609.6 x 1676.4 mm) (WxDxH)
Clearance
Front
Top

36 in (914.4 mm)
13.75 in (349.25 mm)
Weight
Shipping
Operating/with canister

370 lbs (168 kg)
800 lbs (363 kg)


COMMUNICATION AND INTERLOCKS


2 dry contacts – Warning, shutdown


OPTIONS AND ACCESSORIES


Simple remote


(1) Blower model requires dedicated power line for CE compliance (front)
(2)Process specific
 
 
 
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