Dry Bed Abatement – Point of Use – Low Gas Flow
Air pollution regulations, employee health concerns, and growing awareness of toxic emissions from semiconductor processes demand increased improvements in exhaust gas conditioning.
The NOVASAFE® Dry Scrubber reduces the hazards associated with flammable, toxic or corrosive gases and vapors.
NOVASAFE® effluent gas scrubbers offer an extremely safe and efficient way to treat toxic and corrosive gases resulting from hazardous processes. This scrubber is a technologically advanced dry chemical scrubber containing approximately 2.5 gallons (9.5 liters) of granulate. The scrubber is suitable for use in production and general laboratory environments. Operating passively at ambient temperature, chemical granulate in the canister react on contact with process gases and by-products, converting them to non-volatile inorganic solids.