MOCVD Abatement Recommendations for Toxic Gases and Precursors
CS CLEAN SOLUTIONS can provide detailed and experience abatement recommendations for toxic gases and precursors used in MOCVD processing and address the safety-critical area of exhaust gas abatement.
As a deposition process, MOCVD has long since made its way into mainstream manufacturing, and for the coming years will remain a key technology enabling the critical components of many modern-day devices, ranging from cell phones to photovoltaic cells. Given the toxicity, combustibility and, in particular, the high flows of process gases used in III-V epitaxy, the handling of process effluent is considerably more critical to workforce and plant safety than in conventional silicon manufacturing.
Contact us today to learn more about safe and reliable gas abatement:
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